P. Schunk

Impact of polymer film thickness and cavity size on polymer flow during embossing: toward process design rules for nanoimprint lithography

Amy Cha-Tien Sun, William Paul King, Harry D. Rowland, 2005 .

Simulations of nonuniform embossing: The effect of asymmetric neighbor cavities on polymer flow during nanoimprint lithography

Amy Cha-Tien Sun, William Paul King, Harry D. Rowland, 2005 .