M. Boufnichel

Profile control of high aspect ratio trenches of silicon. I. Effect of process parameters on local bowing

F. Grangeon, Pierre Ranson, Philippe Lefaucheux, 2002 .

Profile control of high aspect ratio trenches of silicon. II. Study of the mechanisms responsible for local bowing formation and elimination of this effect

Pierre Ranson, Philippe Lefaucheux, M. Boufnichel, 2003 .