Daniel J. Brown
发表
Hans Meiling,
Igor V. Fomenkov,
Wayne J. Dunstan,
2015,
Advanced Lithography.
Hans Meiling,
Igor V. Fomenkov,
Alex I. Ershov,
2014,
Advanced Lithography.
Igor V. Fomenkov,
Georgiy O. Vaschenko,
Chirag Rajyaguru,
2018,
Photomask Technology.
Bruno M. La Fontaine,
Imtiaz Ahmad,
Michael J. Lercel,
2012,
Advanced Lithography.
Imtiaz Ahmad,
Igor V. Fomenkov,
Alex I. Ershov,
2013,
Advanced Lithography.
Hans Meiling,
Igor V. Fomenkov,
Alex I. Ershov,
2014,
Advanced Lithography.
Michael J. Lercel,
Igor V. Fomenkov,
Alex I. Ershov,
2012,
Advanced Lithography.
Igor V. Fomenkov,
Alex I. Ershov,
David W. Myers,
2013,
Advanced Lithography.
Industrialization of a robust EUV source for high-volume manufacturing and power scaling beyond 250W
Igor V. Fomenkov,
Alex I. Ershov,
Chirag Rajyaguru,
2018,
Advanced Lithography.