T. Inatsuka

Recovery Characteristic of Anomalous Stress Induced Leakage Current of 5.6nm Oxide Films

Tadahiro Ohmi, Rihito Kuroda, Shigetoshi Sugawa, 2011 .

Evaluation for Anomalous Stress-Induced Leakage Current of Gate $ \hbox{SiO}_{2}$ Films Using Array Test Pattern

R. Kuroda, S. Sugawa, Y. Kumagai, 2011, IEEE Transactions on Electron Devices.

Demonstrating distribution of SILC values at individual leakage spots

R. Kuroda, S. Sugawa, Y. Kumagai, 2013, 2013 IEEE International Reliability Physics Symposium (IRPS).

A Test Circuit for Extremely Low Gate Leakage Current Measurement of 10 aA for 80 000 MOSFETs in 80 s

Tadahiro Ohmi, Rihito Kuroda, Shigetoshi Sugawa, 2013 .