Yong Jin Lee

In-Situ Temperature Monitoring in Rtp by Acoustical Techniques

Krishna C. Saraswat, Butrus T. Khuri-Yakub, Fahrettin Levent Degertekin, 1993 .

In-situ ultrasonic thermometry of semiconductor wafers

Krishna C. Saraswat, Butrus T. Khuri-Yakub, Fahrettin Levent Degertekin, 1993 .

Fast-cycle-time single-wafer IC manufacturing

Habib N. Najm, Mehrdad M. Moslehi, Richard A. Chapman, 1994 .

A Universal Thermal Module™ for Clusterable RTP and MOCVD Applications

Charles D. Schaper, Mehrdad M. Moslehi, Ahmad Kermani, 1995 .

In-situ acoustic thermometry and tomography for rapid thermal processing

F.L. Degertekin, K. Saraswat, F. Degertekin, 1993, Proceedings of IEEE International Electron Devices Meeting.

Temperature measurement in rapid thermal processing using the acoustic temperature sensor

Krishna C. Saraswat, Butrus T. Khuri-Yakub, K. Saraswat, 1996 .