Keizo Kinoshita

发表

Self-assembled ultra-low-k porous silica films for 45-nm technology node

Takamaro Kikkawa, Kazuo Kohmura, Akira Ishikawa, 2005, SPIE Optics East.

Naoki Kasai, S. Miura, Hiroaki Honjo, 2009 .

Process and structure designs for high performance Cu low-k interconnects : Special issue on advanced semiconductor processing technology

Yoshihiro Hayashi, Shinobu Saito, Jun Kawahara, 2001 .

A Power-gated 32bit MPU with a Power Controller Circuit Activated by Deep-sleep-mode Instruction Achieving Ultra-low Power Operation

Tetsuo Endoh, Takahiro Hanyu, H. Ohno, 2014 .

Resonant Wavelength Variation Modelling for Microring Resonators based on Fabrication Deviation Analysis

Tohru Mogami, Jun Ushida, Seok-Hwan Jeong, 2017, 2017 European Conference on Optical Communication (ECOC).

Short reach, high temperature operation and high reliability silicon photonic micro-transceivers for embedded and co-packaged system integration

Richard Pitwon, Takashi Muto, Kazuhiko Kurata, 2021, OPTO.

Process control and monitoring in device fabrication for optical interconnection using silicon photonics technology

Tohru Mogami, Seok-Hwan Jeong, Tsuyoshi Horikawa, 2015, 2015 IEEE International Interconnect Technology Conference and 2015 IEEE Materials for Advanced Metallization Conference (IITC/MAM).

1.2 Tbps/cm2 Enabling Silicon Photonics IC Technology Based on 40-nm Generation Platform

Tohru Mogami, Jun Ushida, Seok-Hwan Jeong, 2018, Journal of Lightwave Technology.

Highly thermal-stable, plasma-polymerized BCB polymer film (k=2.6) for Cu dual-damascene interconnects

Yoshihiro Hayashi, Kuniko Kikuta, Akira Furuya, 2000, 2000 Symposium on VLSI Technology. Digest of Technical Papers (Cat. No.00CH37104).

The impacts of fabrication error in Si wire-waveguides on spectral variation of coupled resonator optical waveguides

Tohru Mogami, Seok-Hwan Jeong, Tsuyoshi Horikawa, 2016 .

Height Measurement Using High-Precision Atomic Force Microscope Scanner Combined with Laser Interferometers

Tsuneo Terasawa, Satoshi Gonda, Sumio Hosaka, 2006 .

Etching Magnetic Tunnel Junction with Metal Etchers

Hiromitsu Hada, Keizo Kinoshita, Tadahiko Sugibayashi, 2010 .

A 300-mm Silicon Photonics Platform for Large-Scale Device Integration

Tohru Mogami, Jun Ushida, Seok-Hwan Jeong, 2018, IEEE Journal of Selected Topics in Quantum Electronics.

High-performance optical waveguide devices using 300mm Si photonics platform

Tohru Mogami, Hironori Sasaki, Ken Morito, 2016 .

Highly thermal-stable, plasma-polymerized BCB polymer film

Yoshihiro Hayashi, Keizo Kinoshita, Munehiro Tada, 2003 .

Extraction of SOI thickness deviation based on resonant wavelength analysis for silicon photonics devices

Tohru Mogami, Jun Ushida, Seok-Hwan Jeong, 2017, 2017 IEEE SOI-3D-Subthreshold Microelectronics Technology Unified Conference (S3S).

High-performance silicon photonics process platform for low-power photonic integrated circuits

Tohru Mogami, Junichi Fujikata, Tsuyoshi Horikawa, 2016, 2016 IEEE Silicon Nanoelectronics Workshop (SNW).