Charles Kang

Improving Metrology Fleet KPIs for Advanced Foundry Manufacturing

Alok Vaid, Matthew Sendelbach, Susan Emans, 2019, 2019 30th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC).

Complex metrology on 3D structures using multi-channel OCD

Alok Vaid, Matthew Sendelbach, Charles Kang, 2017, Advanced Lithography.

Implementation of machine learning for high-volume manufacturing metrology challenges (Conference Presentation)

Padraig Timoney, Charles Kang, Naren Yellai, 2018, Advanced Lithography.

Integrated metrology's role in Gas Cluster Ion Beam etch

Charles Kang, Naren Yellai, Laertis Economikos, 2015, 2015 26th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC).