Adrien Broué

Characterization of gold/gold, gold/ruthenium, and ruthenium/ruthenium ohmic contacts in MEMS switches improved by a novel methodology

Patrick Pons, Robert Plana, Frédéric Courtade, 2010 .

VALIDATION OF BENDING TEST BY NANOINDENTATION FOR MICRO-CONTACT ANALYSIS OF RF-MEMS SWITCHES

Patrick Pons, Robert Plana, Frédéric Courtade, 2009 .

Validation of bending tests by nanoindentation for micro-contact analysis of MEMS switches

Patrick Pons, Robert Plana, Frédéric Courtade, 2010 .