L. Mastrogiacomo

Microphotonic Devices Fabricated by Silicon Micromachining Techniques

Enzo Di Fabrizio, L. Grella, Massimo Gentili, 1997 .

Energy density function determination in very‐high‐resolution electron‐beam lithography

L. Grella, Massimo Gentili, A. Lucchesini, 1990 .

Patterned Magnetic Permalloy and Nickel Films: Fabrication by Electron Beam and X-Ray Lithographic Techniques

Annamaria Gerardino, Stefano Cabrini, Patrizio Candeloro, 2002 .

One step electron‐beam lithography for multipurpose diffractive optical elements with 200 nm resolution

D. Peschiaroli, L. Grella, Massimo Gentili, 1996 .

Fast Proximity Corrections for Electron-Beam-Fabricated High Resolution and High-Aspect-Ratio Fresnel Zone Plate

D. Peschiaroli, Enzo Di Fabrizio, L. Grella, 1996 .