T. Kaneoka

Impact of nitridation engineering on microscopic SILC characteristics of sub-10-nm tunnel dielectrics

T. Nakamura, Y. Ohno, K. Kobayashi, 1998, International Electron Devices Meeting 1998. Technical Digest (Cat. No.98CH36217).

Summary Abstract: Role of ions in carbon‐film deposition by a windowless hydrogen lamp

T. Kaneoka, M. Hanabusa, 1987 .