Y. Hasegawa
发表
M. Shikida,
K. Sato,
Y. Hasegawa,
2007,
TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference.
M. Shikida,
K. Sato,
H. Sasaki,
2005,
18th IEEE International Conference on Micro Electro Mechanical Systems, 2005. MEMS 2005..
M. Shikida,
K. Sato,
Y. Hasegawa,
2007,
2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS).