Carl G. Chen

Digital heterodyne interference fringe control system

Mark L. Schattenburg, Ralf K. Heilmann, G. S. Pati, 2001 .

Beam steering system and spatial filtering applied to interference lithography

Mark L. Schattenburg, Ralf K. Heilmann, Paul T. Konkola, 2000 .

Generalized scanning beam interference lithography system for patterning gratings with variable period progressions

Mark L. Schattenburg, Ralf K. Heilmann, G. S. Pati, 2002 .