Mamoru Kohata

Properties of cubic boron nitride films prepared by ion beam assisted deposition

Y. Setsuhara, S. Miyake, M. Kumagai, 1998, 1998 International Conference on Ion Implantation Technology. Proceedings (Cat. No.98EX144).

The Evaluation of the Surface Strength of DLC Films by MSE Method

K. Yasuda, R. Ishigami, K. Kanda, 2014 .

Synthesis of aluminum oxide thin films by ion beam and vapor deposition technology

Y. Setsuhara, S. Miyake, S. Kiyama, 1993 .

Preparation of TiN film on the inner surface of a pipe by plasma-based ion implantation and deposition

K. Yukimura, Xinxin Ma, M. Kumagai, 2003 .

Preparation of aluminum oxide films by ion beam assisted deposition

Y. Setsuhara, S. Miyake, K. Yamaguchi, 2000 .

Preparation of cubic boron nitride film by CO2 laser physical vapour deposition with simultaneous nitrogen ion supply

Nobuo Yasunaga, Mamoru Kohata, Shinei Mineta, 1990 .

Coating and ion implantation to the inner surface of a pipe by metal plasma-based ion implantation and deposition

K. Yukimura, T. Maruyama, Xinxin Ma, 2003 .

Macroparticles on titanium nitiride thin film prepared by cathodic-arc plasma-based ion implantation and deposition

K. Yukimura, T. Maruyama, Xinxin Ma, 2003 .

Interfacial structure control of cubic boron nitride films prepared by ion-beam assisted deposition

Y. Shimoitani, Yasunori Tanaka, Y. Setsuhara, 1997 .

Effects of pressure on the structure of titanium nitride film in the preparation using metallic plasma-based ion implantation and deposition

K. Yukimura, T. Maruyama, M. Kumagai, 2003 .