F. Sugimoto

Influence of Organic Contamination on Silicon Dioxide Integrity

T. Inokuma, S. Hasegawa, F. Sugimoto, 2000 .

Pulse-Field-Assisted Wafer Bonding for Silicon on Insulator

Y. Arimoto, F. Sugimoto, 1992 .

Adsorption Behavior of Organic Contaminants on a Silicon Wafer Surface

F. Sugimoto, Sigeru Okamura, 1999 .

45 nm-node BEOL integration featuring porous-ultra-low-k/Cu multilevel interconnects

S. Nakai, H. Kitada, T. Nakamura, 2005, Proceedings of the IEEE 2005 International Interconnect Technology Conference, 2005..

A pH-Controlled Chemical Mechanical Polishing Method for Thin Bonded Silicon-on-Insulator Wafers

Y. Arimoto, H. Horie, F. Sugimoto, 1995 .