C.V. Jahnes

Simultaneous fabrication of RF MEMS switches and resonators using copper-based CMOS interconnect manufacturing methods

A. Chinthakindi, L. P. Buchwalter, J. Cotte, 2004, 17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest.

Dielectric Charging in Electrostatically Actuated MEMS Ohmic Switches

C. Palego, S. Halder, Zhen Peng, 2008, IEEE Transactions on Device and Materials Reliability.

High-efficiency 60 GHZ antenna fabricated using low-cost silicon micromachining techniques

B. Gaucher, U. Pfeiffer, J. Grzyb, 2007, 2007 IEEE Antennas and Propagation Society International Symposium.