Tatsumi Mizutani

Development of neutral‐beam‐assisted etcher

Takashi Yunogami, Kenetsu Yokogawa, K. Yokogawa, 1995 .

Sputtering yield and radiation damage by neutral beam bombardment

S. Nishimatsu, Shigeru Nishimatsu, Tatsumi Mizutani, 1988 .

Mechanism for CF Polymer Film Deposition through Deep SiO2 Holes in Electron Cyclotron Resonance Plasma

Tetsuo Ono, Tatsumi Mizutani, Ryoji Hamasaki, 1996 .

Radiation damage in SiO2/Si induced by low‐energy electrons via plasmon excitation

Takashi Yunogami, Tatsumi Mizutani, T. Yunogami, 1993 .

Neutral-Beam-Assisted Etching System for Low-Damage SiO2 Etching of 8-Inch Wafers.

Kenetsu Yokogawa, Tatsumi Mizutani, Takasi Yunogami, 1996 .