K.E. Wojciechowski

Post-CMOS Compatible Aluminum Nitride MEMS Filters and Resonant Sensors

J.G. Fleming, M.R. Tuck, R.H. Olsson, 2007, 2007 IEEE International Frequency Control Symposium Joint with the 21st European Frequency and Time Forum.

Post-CMOS-Compatible Aluminum Nitride Resonant MEMS Accelerometers

R. Olsson, J. Fleming, M. Baker, 2008, Journal of Microelectromechanical Systems.

A MEMS resonant strain sensor with 33 nano-strain resolution in a 10 kHz bandwidth

B. Boser, A. Pisano, K. Wojciechowski, 2005, IEEE Sensors, 2005..

A MEMS resonant strain sensor operated in air

B. Boser, A. Pisano, K. Wojciechowski, 2004, 17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest.