Hyuk Joo Kwon

Native blank defect analysis for the study of printability

Kenneth A. Goldberg, Sungmin Huh, Iacopo Mochi, 2010 .

Angular Dependence of the Etch Rates of TaN in CF4/Ar and CHF3/Ar Plasmas

Sungmin Huh, Han-Ku Cho, Sang Heup Moon, 2008 .

Overview of Mask Metrology

Bryan J. Rice, Jenah Harris-Jones, Vibhu Jindal, 2011 .