Dirk Schäfer

F2-Lasers: High-Resolution Micromachining System for Shaping Photonic Components

Kevin P. Chen, Peter R. Herman, Gerd Marowsky, 2001, CLEO 2001.

F2-laser ablation patterning of dielectric layers

Peter R. Herman, Gerd Marowsky, Jürgen Ihlemann, 2001 .

Excimer laser patterned dielectric masks for the fabrication of diffractive optical elements by laser ablation

Gerd Marowsky, K. Mann, Jürgen Ihlemann, 1999 .