A. Korhonen

Control of residual stress of polysilicon thin films by heavy doping in surface micromachining

M. Orpana, A. Korhonen, M. Orpana, 1991, TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers.

Elimination of residual stress in hydrogenated amorphous silicon films

F. Cocks, P. Jones, A. Korhonen, 1982 .

On the thermoelastic properties of hydrogenated amorphous silicon

F. Cocks, P. Jones, A. Korhonen, 1981 .