V. Dobler

Universal threshold for the steam laser cleaning of submicron spherical particles from silicon

Johannes Boneberg, Mario Mosbacher, Volker Dobler, 2000, Applied Physics A.

Steam laser cleaning of silicon surfaces : laser-induced gas bubble nucleation and efficiency measurements

P. Leiderer, J. Boneberg, M. Mosbacher, 2002 .

Comparison of the efficiencies of dry and steam laser cleaning of silicon surfaces

P. Leiderer, J. Boneberg, M. Mosbacher, 1999 .

A comparison of ns and ps steam laser cleaning of Si surfaces

J. Siegel, C. N. Afonso, V. Dobler, 1999 .

Laser-induced particle removal from silicon wafers

J. Solis, Jan Siegel, Johannes Boneberg, 2000, SPIE High-Power Laser Ablation.

Two-dimensional pressure measurements with nanosecond time resolution

Johannes Boneberg, Volker Dobler, P. Leiderer, 1999 .