J. Piquet

Impact of Design on High-Frequency Performance of Advanced MIM Capacitors Using Si $_{3}$ N $_{4}$ Dielectric Layers

A. Farcy, T. Lacrevaz, C. Bermond, 2008 .

Impact of Design on High-Frequency Performance of Advanced MIM Capacitors Using Si $_{3}$N $_{4}$ Dielectric Layers

A. Farcy, T. Lacrevaz, C. Bermond, 2005, IEEE Transactions on Components and Packaging Technologies.

Wide Band Frequency Characterization of High Permittivity Dielectrics (High-K) for RF MIM Capacitors Integrated in BEOL

O. Cueto, M. Gros-Jean, A. Farcy, 2006, 2006 International Interconnect Technology Conference.

Wide band frequency and in situ characterisation of high permittivity insulators (High-K) for H.F. integrated passives

O. Cueto, M. Gros-Jean, A. Farcy, 2006 .

High frequencies characterization of Cu-MIM capacitors in parallel configuration for advanced integrated circuits

O. Cueto, A. Farcy, T. Lacrevaz, 2006 .

Design improvement of RF 3D MIM damascene capacitor

A. Haen, A. Farcy, S. Crémer, 2007, ESSDERC 2007 - 37th European Solid State Device Research Conference.