Y. Matsumoto

发表

Three-axis SOI capacitive accelerometer with PLL C-V converter

Makoto Ishida, Yoshinori Matsumoto, M. Ishida, 1999 .

Fabrication of micro sloping structures of SU-8 by substrate penetration lithography

Y. Matsumoto, J. Onishi, K. Makabe, 2008 .

An integrated micro fluxgate magnetic sensor

Shoji Kawahito, Yoshiaki Tadokoro, Yoshinori Matsumoto, 1996 .

An integrated MOS magnetic sensor with chopper-stabilized amplifier

M. Ishida, Y. Tadokoro, S. Kawahito, 1996 .

Development and evaluation of capacitance detection ASIC for three-axis common electrode type capacitive accelerometer

Shoji Kawahito, Yoshinori Matsumoto, Makoto Ishida, 2001 .

Small&High-Sensitive Three Axis Soi Capacitive Accelerometer

M. Ishida, Y. Matsumoto, M. Nishimura, 2001 .

A planar fluxgate magnetic sensor for on-chip integration

Makoto Ishida, Shoji Kawahito, Yoshiaki Tadokoro, 1997 .

Three Dimensional Polysilicon Type Accelerometer Using Poly-Si/SiO2/Si/SiO2/Si Structure

M. Ishida, Y. Matsumoto, Kijin Kwon, 1997 .

Development and evaluation of capacitance detection ASIC for three-axis common electrode type capacitive accelerometer Member

Y. Matsumoto, 2008 .

A novel deposition technique for fluorocarbon films and its applications for bulk- and surface-micromachined devices

M. Ishida, Y. Matsumoto, Kazumasa Yoshida, 1998 .

A Capacitive Accelerometer Using Sdb-soi Structure

Y. Matsumoto, M. Ishida, H. Tanaka, 1995, Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95.

Analysis of electrically induced swirling flow of isotonic saline in a mixing microchannel

H. Minamitani, Y. Matsumoto, Shuzo Hirahara, 2007 .

Fabrication of three-dimensional structures by image processing

Y. Matsumoto, Sayaka Shimizu, Kei Hanai, 2006 .

Fluorocarbon film for protection from alkaline etchant and elimination of in-use stiction

Makoto Ishida, Yoshinori Matsumoto, M. Ishida, 1997, Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97).

Characterization of miniaturized one-side-electrode-type fluid-based inclinometer

Yoshinori Matsumoto, Asrulnizam Abd Manaf, K. Nakamura, 2008 .

Effect of Initial Solidified Structure on Ridging Phenomenon and Texture in Type 430 Ferritic Stainless Steel Sheets

Y. Matsumoto, J. Hamada, F. Fudanoki, 2003 .

The property of plasma-polymerized fluorocarbon film in relation to CH4/C4F8 ratio and substrate temperature

M. Ishida, Y. Matsumoto, 2000 .

Research on measurement accuracy by simultaneous counting and differential configuration for quartz crystal smell sensor

S. Shiratori, K. Kyung, Y. Matsumoto, 2016 .

Stress-sensitive differential amplifiers using piezoresistive effects of MOSFETs and their application to three-axial accelerometers

Makoto Ishida, Hidekuni Takao, Yoshinori Matsumoto, 1998 .

A monolithically integrated three-axis accelerometer using CMOS compatible stress-sensitive differential amplifiers

Makoto Ishida, Hidekuni Takao, M. Ishida, 1999 .

Analysis and design considerations of three-dimensional vector accelerometer using SOI structure for wide temperature range

Hidekuni Takao, Yoshinori Matsumoto, Makoto Ishida, 1996 .

Fabrication and application of micro tapered structure by proximity backside exposure

Yoshinori Matsumoto, Keiji Makabe, Y. Matsumoto, 2009 .

Integrated capacitive absolute pressure sensor

Yoshinori Matsumoto, Y. Matsumoto, Masayoshi Esasi, 1993 .

A monolithically integrated three axial accelerometer using stress sensitive CMOS differential amplifiers

Makoto Ishida, Hidekuni Takao, Yoshinori Matsumoto, 1997, Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97).