T. Ariga

Development of a 5 kHz Ultra-Line-Narrowed F2 Laser for Dioptric Projection Systems.

T. Suganuma, H. Mizoguchi, T. Kumazaki, 2002 .

Device for testing the main engine bearing in rail vehicles

Hiroyuki Suzuki, Tatsuya Ariga, Shinichi Ikeda, 1998 .

EUV radiation characteristics of a CO2 laser produced Xe plasma

Tatsuya Ariga, Hiroshi Komori, Akira Endo, 2006 .

High power and short pulse RF-excited CO2 laser MOPA system for LLP EUV light source

Tatsuya Ariga, Akira Endo, Hideo Hoshino, 2006, SPIE LASE.

Development of high-power ArF/F2 laser platform for VUV microlithography

Tatsuya Ariga, Hakaru Mizoguchi, Akira Sumitani, 2004, SPIE Advanced Lithography.