Ming-zhen Lu

Atomic force microscope scanning head with 3-dimensional orthogonal scanning to eliminate the curved coupling.

Xiaodong Hu, Yu-shu Shi, Wei Li, 2018, Ultramicroscopy.

Metrological atomic force microscope and traceable measurement of nano-dimension structures

Yu-shu Shi, Wei Li, Si-tian Gao, 2013 .

An atomic force microscope head designed for nanometrology

Sitian Gao, Hongtang Gao, Hua Du, 2007 .

Mechanical and electrical characterization of quartz tuning fork force sensors

Jan Herrmann, Malcolm B. Gray, Mingzhen Lu, 2015 .