Hon Chan Chien

An ultra-precision XY/spl Theta//sub Z/ piezo-micropositioner. II. Experiment and performance

Shuo-Hung Chang, Shuo-Hung Chang, C. K. Tseng, 1999 .

An Ultra-Precision XYθZ Piezo-Micropositioner Part I: Design and Analysis

Shuo-Hung Chang, C. K. Tseng, H. Chien, 1999 .

An Ultra-Precision XYΘ Z Piezo-Micropositioner Part II : Experiment and Performance

Chung Kai Tseng, Hon Chan Chien, Shuo Hung Chang, 1999 .