H. Shimada

High-Reliability Lithography Performed by Ultrasonic and Surfactant-Added Developing System

Tadahiro Ohmi, Masanobu Onodera, Shigeki Shimomura, 1993 .

Current drive enhancement by using high-permittivity gate insulator in SOI MOSFET's and its limitation

Tadahiro Ohmi, T. Ohmi, H. Shimada, 1996 .