H. Heerlein

Amorphous silicon position sensitive detectors applied to micropositioning

Elvira Fortunato, Rodrigo Martins, Hugo Águas, 2006 .

Evaluation and fabrication of AFM array for ESA-Midas/Rosetta space mission

Teodor Gotszalk, Ivo W. Rangelow, Piotr Grabiec, 2001 .

Electrostatically driven microgripper

Ivo W. Rangelow, B. E. Volland, B. Volland, 2002 .

Dry etching with gas chopping without rippled sidewalls

Ivo W. Rangelow, F. Shi, B. E. Volland, 1999 .

The application of secondary effects in high aspect ratio dry etching for the fabrication of MEMS

Ivo W. Rangelow, B. E. Volland, Ivan Kostic, 2001 .

Experimental results of the stochastic Coulomb interaction in ion projection lithography

F. Shi, Rainer Kaesmaier, Hans Loschner, 1999 .