G. Staufert

Behaviour of a silicon spring fabricated by wire electro-discharge machining

A. Dommann, G. Staufert, D. Lauger, 1993 .

Biaxial scanning mirror activated by bimorph structures for medical applications

Alex Dommann, N. F. de Rooij, R. A. Buser, 1992 .

Surface-micromachined Ta-Si-N beams for use in micromechanics

M. Gretillat, M. Nicolet, A. Dommann, 1998 .

Ternary TaSiN films for sensors and actuators

M. Nicolet, A. Dommann, C. Linder, 1997 .

Amorphous Metals as New Materials for Transducer Applications

M. Nicolet, A. Dommann, G. Staufert, 1997 .