M. Sekimura

Anisotropic etching of surfactant-added TMAH solution

M. Sekimura, M. Sekimura, 1999, Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.99CH36291).

Silicon X-ray sensor with modified electrode structures

Y. Naruse, M. Sekimura, 1983 .

Electrostatic Linear Microactuator with Vibrating Motion

K. Suzumori, M. Sekimura, A. Koga, 1997 .

Electrostatic linear micro actuator with vibrating motion (application to the focusing mechanism of a miniature CCD camera)

Koichi Suzumori, Toyomi Miyagawa, Masayuki Sekimura, 1997, Adv. Robotics.

Electrostatic linear micro actuators with vibrating motion for pan-tilt drive of a micro CCD camera

M. Sekimura, A. Koga, T. Miyagawa, 1996, MHS'96 Proceedings of the Seventh International Symposium on Micro Machine and Human Science.

Development of Micro Channel Heat Exchanging

Masayuki Sekimura, Masaru Ishizuka, Koichiro Kawano, 2001 .

Development of Micro Channel Heat Exchanging.

Masaru Ishizuka, Masayuki Sekimura, Koichiro Kawano, 2000 .

Development of a periodically structured monocrystalline target of Si for X-ray emission

I. Endo, K. Nakayama, A. Potylitsin, 1998 .