Richard A. Gottscho

发表

Light scattering methods for semiconductor process monitoring and control

Diane Lambert, Jeffrey A. Gregus, Joseph B. Kruskal, 1992, Other Conferences.

Nascent Product Time-Of-Flight Distributions From Laser Initiated Etching Of Germanium By Bromine

Richard A. Gottscho, Cameron A. Moore, Glenn P. Davis, 1984, Photonics West - Lasers and Applications in Science and Engineering.

Real-Time Monitoring of Surface Chemistry During Plasma Processing.

Richard A. Gottscho, Eray S. Aydil, Yves J. Chabal, 1994 .

Real‐time latent image monitoring during holographic fabrication of submicron diffraction gratings

Euijoon Yoon, Richard A. Gottscho, Todd R. Hayes, 1993 .

Design of High Density Plasma Sources For

Richard A. Gottscho, Michael A. Lieberman, R. Gottscho, 1993 .

The grand challenges of plasma etching: a manufacturing perspective

Richard A. Gottscho, Keren J. Kanarik, R. Gottscho, 2014 .

Optical emission actinometry and spectral line shapes in rf glow discharges

Vincent M. Donnelly, V. M. Donnelly, Richard A. Gottscho, 1984 .

Semiempirical profile simulation of aluminum etching in a Cl2/BCl3 plasma

Richard A. Gottscho, Vahid Vahedi, R. Gottscho, 2002 .

Reactive ion etching profile and depth characterization using statistical and neural network analysis of light scattering data

Joseph B. Kruskal, Richard A. Gottscho, A. Kornblit, 1993 .

Etch depth estimation of large-period silicon gratings with multivariate calibration of rigorously simulated diffraction profiles

David M. Haaland, John R. McNeil, Richard A. Gottscho, 1994 .

The Gaseous Electronics Conference radio‐frequency reference cell: A defined parallel‐plate radio‐frequency system for experimental and theoretical studies of plasma‐processing discharges

David B. Graves, Mark A. Sobolewski, James K. Olthoff, 1994 .

Real-time, in situ monitoring of GaAs and AlGaAs photoluminescence during plasma processing

Stephen J. Pearton, Richard A. Gottscho, R. Gottscho, 1990 .

Optical techniques in plasma diagnostics

Terry A. Miller, Richard A. Gottscho, R. Gottscho, 1984 .

Ion transport in an electron cyclotron resonance plasma

Richard A. Gottscho, Toshiki Nakano, Nader Sadeghi, 1991 .

Multiple steady states in electron cyclotron resonance plasma reactors

Richard A. Gottscho, Eray S. Aydil, E. Aydil, 1993 .

Ion and neutral temperatures in electron cyclotron resonance plasma reactors

Richard A. Gottscho, Toshiki Nakano, Nader Sadeghi, 1991 .