Patrick Plouhinec

Broadband and Efficient Diffraction

S. Cassette, P. Lalanne, S. Bansropun, 2013 .

Broadband and Efficient Diffraction

P. Lalanne, S. Collin, B. Loiseaux, 2013, 1306.5432.

Simulations of radical and ion fluxes on a wafer in a Cl2/Ar inductively coupled plasma discharge: Confrontation with GaAs and GaN etch experiments

P. Chabert, S. Cassette, S. Bansropun, 2010 .