N. D. Masters

Interferometry of actuated microcantilevers to determine material properties and test structure nonidealities in MEMS

Brian D. Jensen, David A. LaVan, Fernando Bitsie, 2001 .

Side-by-Side Comparison of Passive MEMS Strain Test Structures under Residual Compression

Brian D. Jensen, M. P. de Boer, B. Jensen, 2001 .