K. Shima

发表

Ammonothermal growth of 2 inch long GaN single crystals using an acidic NH4F mineralizer in a Ag-lined autoclave

M. Saito, S. Chichibu, Daisuke Tomida, 2020 .

Room temperature photoluminescence lifetime for the near-band-edge emission of epitaxial and ion-implanted GaN on GaN structures

A. Uedono, K. Ueno, S. Chichibu, 2019, Japanese Journal of Applied Physics.

Annealing Behavior of Vacancy‐Type Defects in Mg‐ and H‐Implanted GaN Studied Using Monoenergetic Positron Beams

A. Uedono, S. Chichibu, S. Ishibashi, 2019, physica status solidi (b).

Large electron capture-cross-section of the major nonradiative recombination centers in Mg-doped GaN epilayers grown on a GaN substrate

A. Uedono, K. Ueno, S. Chichibu, 2018 .

Impact of high-temperature implantation of Mg ions into GaN

H. Amano, S. Chichibu, S. Nitta, 2020, Japanese Journal of Applied Physics.

Suppression of Green Luminescence of Mg‐Ion‐Implanted GaN by Subsequent Implantation of Fluorine Ions at High Temperature

Kevin J. Chen, H. Amano, S. Chichibu, 2020, physica status solidi (b).

Study on the Adhesion Strength of CVD-Cu Films with ALD-Co(W) Underlayers Made Using Amidinato Precursors

Y. Shimogaki, T. Momose, K. Shima, 2015 .

Comparative Study on Cu-CVD Nucleation Using β-diketonato and Amidinato Precursors for Sub-10-nm-Thick Continuous Film Growth

Y. Shimogaki, T. Momose, K. Shima, 2015 .

Role of W and Mn for reliable 1X nanometer-node ultra-large-scale integration Cu interconnects proved by atom probe tomography

Y. Shimogaki, Y. Shimizu, Koji Inoue, 2014 .

Conformal and Stoichiometric Chemical Vapor Deposition of Silicon Carbide onto Ultradeep Heterogeneous Micropores by Controlling the Initial Nucleation Stage.

N. Sato, Y. Shimogaki, Y. Fukushima, 2021, ACS applied materials & interfaces.

High‐Aspect‐Ratio Parallel‐Plate Microchannels Applicable to Kinetic Analysis of Chemical Vapor Deposition

N. Sato, Y. Shimogaki, Y. Fukushima, 2016 .

Separate evaluation of multiple film-forming species in chemical vapor deposition of SiC using high aspect-ratio microchannels

N. Sato, Y. Shimogaki, Y. Fukushima, 2017 .

Porous Membranes as Sacrificial Layers Enabling Conformal Chemical Vapor Deposition Involving Multiple Film-Forming Species.

N. Sato, Y. Shimogaki, Y. Fukushima, 2020, ACS applied materials & interfaces.

Kinetic study on heterogeneous nucleation and incubation period during chemical vapor deposition.

N. Sato, Y. Shimogaki, Y. Fukushima, 2023, The Journal of chemical physics.

Identification of Film-Forming Species during SiC-CVD of CH3SiCl3/H2 by Exploiting Deep Microtrenches

N. Sato, Y. Shimogaki, Y. Fukushima, 2019, ECS Journal of Solid State Science and Technology.

Self-Assembled Nano-Stuffing Structure in CVD and ALD Co(W) Films as a Single-Layered Barrier/Liner for Future Cu-Interconnects

Y. Shimogaki, T. Nogami, T. Momose, 2013 .

Precursor-based designs of nano-structures and their processing for Co(W) alloy films as a single layered barrier/liner layer in future Cu-interconnect

Hideharu Shimizu, Takeshi Momose, Kohei Shima, 2015 .

Elementary gas‐phase reactions of radical species during chemical vapor deposition of silicon carbide using CH 3 SiCl 3

N. Sato, Y. Shimogaki, M. Koshi, 2021 .

Dopant activation process in Mg-implanted GaN studied by monoenergetic positron beam

A. Uedono, K. Ueno, S. Chichibu, 2021, Scientific Reports.

Photoluminescence Studies of Sequentially Mg and H Ion-implanted GaN with Various Implantation Depths and Crystallographic Planes

A. Uedono, S. Chichibu, K. Kojima, 2019, International Workshop on Junction Technology.

Self-formed compositional superlattices triggered by cation orderings in m-plane Al1−xInxN on GaN

S. Chichibu, Y. Kangawa, K. Kojima, 2020, Scientific Reports.

Steady-state and dynamic characteristics of deep UV luminescence in rock salt-structured MgxZn1−xO

M. Ono, T. Onuma, S. Chichibu, 2023, Journal of Applied Physics.