J. Tortai

发表

P. Schiavone, T. Figueiro, J. Tortai, 2015 .

Jean-Hervé Tortai, A. Jouve, J. Simon, 2007 .

R. Sundararaman, D. Gall, P. Patsalas, 2019, The Journal of Physical Chemistry C.

N. Bonifaci, N. Bonifaci, A. Denat, 2004, Proceedings of the 2004 IEEE International Conference on Solid Dielectrics, 2004. ICSD 2004..

J. Tortai, R. Duru, D. Le Cunff, 2022, 2022 33rd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC).

Jérôme Hazart, Patrick Schiavone, David Fuard, 2009, Advanced Lithography.

J. Boussey, M. Zelsmann, C. Sourd, 2008 .

Olivier Joubert, C. Perret, Cécile Gourgon, 2003 .