L.‐M. Buchmann

Electron‐beam induced tungsten deposition: Growth rate enhancement and applications in microelectronics

W. H. Brünger, W. Brünger, L. Buchmann, 1992 .

Chemically amplified deep ultraviolet resist for positive tone ion exposure

M. Torkler, W. H. Bruenger, M. Torkler, 1997 .

Fabrication of 3.5 GHz surface acoustic wave filters by ion projection lithography

M. Kreutzer, G. Zwicker, M. Torkler, 1992 .