Hung-Lin Hsieh

发表

Novel interferometric stage based on quasi-common-optical-path configuration for large scale displacement

Hung-Lin Hsieh, 2011 .

Full-field wafer warpage measurement technique

Hung-Lin Hsieh, J. Y. Lee, Y. G. Huang, 2017, Optical Metrology.

Heterodyne grating interferometry based on sinusoidal phase modulation for displacement measurement

Ju-Yi Lee, Hung-Lin Hsieh, Zhi Ying Lin, 2017, Optical Metrology.

Symmetrical double diffraction laser encoder

Hung-Lin Hsieh, An-Jie Liang, Pei-Yun He, 2018, Photonics Europe.

6-DOF displacement and angle measurements using heterodyne laser encoder

Hung-Lin Hsieh, Ssu-Wen Pan, Wei-Cheng Wang, 2013, Optics & Photonics - NanoScience + Engineering.

Double corner cube method for enhancing the sensitivity of straightness measurement

Ju-Yi Lee, Cheng-Chih Hsu, Hung-Lin Hsieh, 2012, 2012 Proceedings of SICE Annual Conference (SICE).

2-DOF in-Plane Displacement Measurement by Wollaston Prism-based Interferometer

Ju-Yi Lee, Hung-Lin Hsieh, Bo-Yen Sun, 2018, 2018 14th IEEE/ASME International Conference on Mechatronic and Embedded Systems and Applications (MESA).

Focusing type grating interferometer

Hung-Lin Hsieh, Bo-Yen Sun, Jia-Xian Liao, 2018, Photonics Europe.

Development of a Compound Speckle Interferometer for Precision Three-Degree-of-Freedom Displacement Measurement

Hung-Lin Hsieh, Bo-Yen Sun, 2021, Sensors.

Development of a grating-based interferometer for six-degree-of-freedom displacement and angle measurements.

Hung-Lin Hsieh, Ssu-Wen Pan, H. Hsieh, 2015, Optics express.

Heterodyne Wollaston laser encoder for measurement of in-plane displacement.

Wei Chen, Hung-Lin Hsieh, H. Hsieh, 2016, Optics express.

Wavelength-modulated heterodyne grating shearing interferometry for precise displacement measurement

Hung-Lin Hsieh, Ju-Yi Lee, Yu-Che Chung, 2014 .

Heterodyne grating interferometer based on a quasi-common-optical-path configuration for a two-degrees-of-freedom straightness measurement.

Gilles Lerondel, Hung-Lin Hsieh, Ju-Yi Lee, 2011, Applied optics.

Two-dimensional displacement measurement by quasi-common-optical-path heterodyne grating interferometer.

Gilles Lerondel, Hung-Lin Hsieh, Ju-Yi Lee, 2011, Optics express.

Development of an angular displacement measurement technique through birefringence heterodyne interferometry.

Yang Yang, Hung-Lin Hsieh, Ju-Yi Lee, 2016, Optics express.

Three-degree-of-freedom displacement measurement using grating-based heterodyne interferometry.

Hung-Lin Hsieh, Ssu-Wen Pan, H. Hsieh, 2013, Applied optics.