Koji Neishi

Growth kinetics and thermal stability of a self-formed barrier layer at Cu-Mn∕SiO2 interface

Junichi Koike, K. Neishi, J. Koike, 2007 .

Formation of a manganese oxide barrier layer with thermal chemical vapor deposition for advanced large-scale integrated interconnect structure

Hitoshi Itoh, Hiroshi Sato, Junichi Koike, 2008 .

Chemical Vapor Deposition of Mn and Mn Oxide and their Step Coverage and Diffusion Barrier Properties on Patterned Interconnect Structures

Hitoshi Itoh, Hiroshi Sato, Junichi Koike, 2009 .