M. Ashiki

Novel high-performance pressure sensors using double SOI structures

Makoto Ishida, S. Kawahito, Tetsuro Nakamura, 1991, TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers.

Micromachined solenoids for highly sensitive magnetic sensors

S. Kawahito, Y. Sasaki, S. Kawahito, 1991, TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers.

A thermo-pneumatic in-channel microvalve with PDMS diaphragm for integrated blood examination system on silicon

K. Sawada, H. Takao, M. Ishida, 2003, TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664).