Huei Mei Kao

High-throughput electron-beam lithography with a raster-scanned, variably shaped beam

Volker Boegli, Stephen A. Rishton, Richard L. Lozes, 2001 .

Raster shaped beam pattern generation

Volker Boegli, Allan L. Sagle, Stephen A. Rishton, 1999 .

Implementation of real-time proximity effect correction in a raster shaped beam tool

Volker Boegli, Stephen A. Rishton, U. Hofmann, 2000 .