Yang Zhenchuan

An experimental investigation on decoupling performance for a lateral axis micromachined gyroscope with varying environmental parameters

Liu Xuesong, Cui Jian, Guo Zhongyang, 2011 .

Fabrication of Ultra Deep Electrical Isolation Trenches with High Aspect Ratio Using DRIE and Dielectric Refill

Yan Guizhen, Wang Yangyuan, Wang Yang-yuan, 2005 .