S. Sugawa

Development and Practical Application of High-efficiency Fire Control System for the Clean Room

S. Fukuda, T. Ohmi, S. Sugawa, 2006, 2006 IEEE International Symposium on Semiconductor Manufacturing.

Application of hydrogenated water to united water supply system for high performance and step-by-step investment type system LSI manufacturing fab

Tadahiro Ohmi, Yoshio Yamazaki, S. Sugawa, 2003 .