Y. Hishinuma

Mass-loaded cantilevers with suppressed higher-order modes for magnetic resonance force microscopy

D. Rugar, T.W. Kenny, B.W. Chui, 2003, TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664).

Piezoelectric unimorph microactuator arrays for single-crystal silicon continuous-membrane deformable mirror

Eui-Hyeok Yang, Y. Hishinuma, Y. Hishinuma, 2006, Journal of Microelectromechanical Systems.

Large aperture deformable mirror with a transferred single-crystal silicon membrane actuated using large-stroke PZT unimorph actuators

Eui-Hyeok Yang, Y. Hishinuma, E. Yang, 2005, The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05..

Thin-Film Piezoelectric Unimorph Actuator-Based Deformable Mirror With a Transferred Silicon Membrane

Eui-Hyeok Yang, S. Trolier-McKinstry, E. Bloemhof, 2006, Journal of Microelectromechanical Systems.