Vladimir I. Ivakhnenko

Modeling of scatter from small pits of arbitrary shape

John C. Stover, Vladimir I. Ivakhnenko, Craig A. Scheer, 1998, Photonics West.

Comparison of surface PSDs calculated from both AFM profiles and scatter data

John C. Stover, Vladimir I. Ivakhnenko, Craig A. Scheer, 1998, Photonics West.

Effects of particle shape on particle identification and scatter predictions

John C. Stover, Yuri Eremin, Vladimir I. Ivakhnenko, 2001, SPIE Optics + Photonics.

Use of light scatter signals to identify particle material

John C. Stover, Yuri Eremin, Vladimir I. Ivakhnenko, 2001, SPIE Optics + Photonics.

Comparison of models and measurements of scatter from surface-bound particles

John C. Stover, Vladimir I. Ivakhnenko, Craig A. Scheer, 1998, Photonics West.

Modeled and measured scatter from vias

John C. Stover, Yuri Eremin, Vladimir I. Ivakhnenko, 1999, Photonics West.