O. Morozov

Oxidized bridges technology for suspended MEMS fabrication using standard silicon wafer

I. Amirov, A. Postnikov, O. Morozov, 2015 .

SiO2 film deposition in a low-pressure RF inductive discharge SiH4 + O2 plasma

I. Amirov, O. Morozov, 2000 .

Mechanical strength study of SiO2 isolation blocks merged in silicon substrate

A. Postnikov, O. Morozov, 2014 .

Aspect-ratio-independent anisotropic silicon etching in a plasma chemical cyclic process

I. Amirov, O. Morozov, 2007 .

Implantation of low-energy boron ions into silicon from a low-temperature high-density Ar + BF3 plasma

A. A. Orlikovskii, I. Amirov, O. Morozov, 2000 .

Etching of Silicon and Silicon Dioxide in Dense Low-Pressure Inductively Coupled Radiofrequency Discharge Fluorocarbon Plasmas

I. Amirov, M. Izyumov, O. Morozov, 2003 .

Influence of Modification of Zn-Mg(Zr)Si Oxide Systems by Sodium and Potassium on their Catalytic Properties in the Process of Obtaining 1,3-Butadiene from Ethanol

P. Kyriienko, O. Morozov, S. Soloviev, 2022, Theoretical and Experimental Chemistry.

A Modernized Bosch Etching Process for the Formation of Tapered Structures on a Silicon Surface

A. Rudy, O. Morozov, S. Kurbatov, 2021, Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques.

Oxidized bridges technology for suspended MEMS fabrication using standard silicon wafer

I. Amirov, O. Morozov, A. Postnikov, 2014, Microsystem Technologies.