Zhong-ling Dai

发表

Effect of reactant transport on the trench profile evolution for silicon etching in chlorine plasmas

You-nian Wang, Sai-Qian Zhang, Zhong-ling Dai, 2014 .

Numerical results for the Ar and CF4 mixture gas in a dual frequency capacitively coupled plasma using a hybrid model

Zhi-Cheng Li, You-nian Wang, Zhong-ling Dai, 2009 .

Study of Characteristics of the Radio-Frequency Sheath over a Substrate with a Circular Trench

You-nian Wang, Zhong-ling Dai, M. Hao, 2011 .

Comparison between characteristics of radio-frequency sheaths and pulse sheaths with insulating substrates

You-nian Wang, Zhong-ling Dai, 2003 .

A self-consistent method for solving ion diffusion and mobility coefficients

Wenhua Wang, Shuxia Zhao, Zhong-ling Dai, 2021, Physics of Plasmas.

Hybrid simulation of electron energy distributions and plasma characteristics in pulsed RF CCP sustained in Ar and SiH4/Ar discharges

You-nian Wang, Ying-ying Zhang, Zhong-ling Dai, 2017 .

A self-consistent hybrid model of a dual frequency sheath: Ion energy and angular distributions

You-nian Wang, Zhong-ling Dai, Xiang Xu, 2007 .

Effects of reactor geometry and frequency coupling on dual-frequency capacitively coupled plasmas

You-nian Wang, Yu-Ru Zhang, Dongping Liu, 2013 .

Heating mechanisms and particle flow balancing of capacitively coupled plasmas driven by combined dc/rf sources

You-nian Wang, Zhong-ling Dai, Wei Jiang, 2008 .

Study on atomic layer etching of Si in inductively coupled Ar/Cl2 plasmas driven by tailored bias waveforms

You-nian Wang, Sai-Qian Zhang, Zhong-ling Dai, 2017 .

Spatiotemporal characteristics of the collisionless rf sheath and the ion energy distributions arriving at rf-biased electrodes.

You-nian Wang, T. Ma, Zhong-ling Dai, 2002, Physical review. E, Statistical, nonlinear, and soft matter physics.

Study on feature profile evolution for chlorine etching of silicon in an RF biased sheath

You-nian Wang, Sai-Qian Zhang, Zhong-ling Dai, 2013 .

Hybrid Simulation of Duty Cycle Influences on Pulse Modulated RF SiH4/Ar Discharge

You-nian Wang, Shuxia Zhao, Zhong-ling Dai, 2016 .

Multiple ion dynamics model for the collisionless rf sheaths and the ion energy distributions at rf-biased electrodes in fluorocarbon plasmas.

You-nian Wang, Zhong-ling Dai, 2002, Physical review. E, Statistical, nonlinear, and soft matter physics.

Influence of the low-frequency source parameters on the plasma characteristics in a dual frequency capacitively coupled plasma reactor: Two dimensional simulations

You-nian Wang, Zhong-ling Dai, Xiang Xu, 2009 .

Dynamic sheath model at pulsed-biased insulating substrates

You-nian Wang, Zhong-ling Dai, 2002 .

Simulations of ion transport in a collisional radio-frequency plasma sheath.

You-nian Wang, Zhong-ling Dai, 2004, Physical review. E, Statistical, nonlinear, and soft matter physics.

Simulations of dual rf-biased sheaths and ion energy distributions arriving at a dual rf-biased electrode

You-nian Wang, Z. Guan, Zhong-ling Dai, 2005 .

The impact of ion mobility coefficients on plasma discharge characteristics

Wenhui Wang, Shuxia Zhao, Zhong-ling Dai, 2022, Physics of Plasmas.

Effects of external magnetic and electric field on multipactor and plasma breakdown of high-power microwave window

You-nian Wang, Zhong-ling Dai, F. Gao, 2023, Physics of Plasmas.

Weak Radio-Frequency Signal Detection Based on Piezo-Opto-Electro-Mechanical System: Architecture Design and Sensitivity Prediction

Kai Yang, Zhengyuan Xu, Junyu Zhang, 2020, IEEE Internet of Things Journal.

Ultra High Q Lithium Niobate Resonator at 15-Degree Three-Dimensional Euler Angle

C. Zuo, Haiding Sun, Zhong-ling Dai, 2022, IEEE Electron Device Letters.

A 6.4-GHz Spurious-Free Acoustic Filter based on Lithium Niobate S1-Mode Resonator

C. Zuo, Zhong-ling Dai, Zijia Su, 2023, 2023 IEEE/MTT-S International Microwave Symposium - IMS 2023.