D. Cooperberg

发表

Semiempirical profile simulation of aluminum etching in a Cl2/BCl3 plasma

Richard A. Gottscho, Vahid Vahedi, R. Gottscho, 2002 .

Feature scale model of Si etching in SF6∕O2∕HBr plasma and comparison with experiments

E. Aydil, M. Kiehlbauch, D. Cooperberg, 2005 .

Unmagnetized sheath waves

C. Birdsall, D. Cooperberg, 1998 .

Particle-in-cell simulation of plasma surface wave sustained discharges

C. Birdsall, D. Cooperberg, 1996, IEEE Conference Record - Abstracts. 1996 IEEE International Conference on Plasma Science.

Surface wave sustained plasmas in a metal bound plasma slab

Charles K. Birdsall, C. Birdsall, D. Cooperberg, 1998 .

Profile simulation of high aspect ratio contact etch

E. Hudson, Erik A. Edelberg, D. Cooperberg, 2005 .

Electron surface waves in a nonuniform plasma slab

D. Cooperberg, 1998 .

Series resonance sustained plasmas in a metal bound plasma slab

C. Birdsall, D. Cooperberg, 1998 .

Electron surface waves in a plasma slab with uniform ion density

D. Cooperberg, 1998 .

Manufacturability considerations in designing optical monitoring methods for control of plasma etch processes

Vijayakumar C. Venugopal, Andrew Perry, Kim V. Wallace, 2003, SPIE Optics + Photonics.