A. Summanwar

Fabrication of 24-MHz-Disk Resonators With Silicon Passive Integration Technology

B. Legrand, F. Neuilly, L. Buchaillot, 2010, IEEE Electron Device Letters.

Elimination of notching phenomenon which occurs while performing deep silicon etching and stopping on an insulating layer

F. Neuilly, T. Bourouina, T. Bourouina, 2008, 2008 Ph.D. Research in Microelectronics and Electronics.

High-Q and low-Rm 24-MHz radial-contour mode disk resonators fabricated with silicon passive integration technology

B. Legrand, F. Neuilly, L. Buchaillot, 2009, TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference.