H. Korogi

Force-controllable, optically driven micromachines fabricated by single-step two-photon microstereolithography

Koji Ikuta, Shoji Maruo, H. Korogi, 2003 .

Effects of N Doping in Ru-Ta on Barrier Property and Reliability Performance for Cu Interconnects

H. Korogi, N. Torazawa, S. Matsumoto, 2016 .

The Development of Cu Filling and Reliability Performance with Ru-Ta Alloy Barrier for Cu Interconnects

H. Korogi, N. Torazawa, S. Matsumoto, 2016 .

Creativity education by using micromachines and MEMS : The world's first micromachine Lab. for children at newly built national museum of emerging science and innovation

Koji Ikuta, Shoji Maruo, H. Korogi, 2002 .

Remote light-driven micromachines fabricated by 200 nm microstereolithography

K. Ikuta, S. Maruo, H. Korogi, 2001, Proceedings of the 2001 1st IEEE Conference on Nanotechnology. IEEE-NANO 2001 (Cat. No.01EX516).

Effects of Ru-Ta Alloy Barrier on Cu Filling and Reliability for Cu Interconnects

K. Asai, K. Maekawa, M. Kojima, 2008, 2008 International Interconnect Technology Conference.

Optically Driven Micromanipulation Tools Fabricated by Two-photon Microstereolithography

K. Ikuta, S. Maruo, H. Korogi, 2002 .

Submicron manipulation tools driven by light in a liquid

Koji Ikuta, Shoji Maruo, H. Korogi, 2003 .

High-Performance Extremely Low-k Film Integration Technology with Metal Hard Mask Process for Cu Interconnects

H. Korogi, N. Torazawa, T. Harada, 2016 .