Yu. B. Kiryukhin

LASER APPLICATIONS AND OTHER TOPICS IN QUANTUM ELECTRONICS: Laser-induced extreme UV radiation sources for manufacturing next-generation integrated circuits

V. Borisov, A. Vinokhodov, A. Ivanov, 2009 .

High-power gas-discharge EUV source

A. S. Ivanov, V. Borisov, A. Vinokhodov, 2002 .

Output energy evolution effects in a pulse-periodic XeCl excimer laser with an average power of ∼400 W

V. Borisov, A. Vinokhodov, Yu. B. Kiryukhin, 1987 .

Pulse-periodic electric discharge XeCl laser

A. Morozov, V. Borisov, A. Vinokhodov, 1990 .

EUV sources using Xe and Sn discharge plasmas

Vladimir M. Borisov, A. S. Ivanov, Oleg B. Khristoforov, 2004 .